半導体ウエハ、ガラス基板搬送用クリーンロボット SEMISTARシリーズSEMISTAR-VD95D
SEMISTARシリーズSEMISTAR-VD95D
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(株)安川電機
速く、そしてダメージレス
あるべき姿を具現化した
ウエハ搬送用クリーンロボット
- 使用用途
- 搬送
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製品説明
最大で第4世代(730×920mm級)のガラス基板に対応
アーム部にリンク機構を採用することにより高剛性を実現
真空内ベルト駆動を採用していないため低放出ガス性能を実現
アーム内に基板有無センサ用配線を内蔵可能
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検索条件に一致する情報はありませんでした。
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こんなお問い合わせ
お待ちしております。
- 目的に応じた製品サービスの相談をしたい。
- 製品のデモ・サンプルの紹介を受けたい。