半導体ウエハ、ガラス基板搬送用クリーンロボット SEMISTARシリーズSEMISTAR-VD10D
SEMISTARシリーズSEMISTAR-VD10D
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(株)安川電機
速く、そしてダメージレス
あるべき姿を具現化した
ウエハ搬送用クリーンロボット
- 使用用途
- 搬送
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製品説明
最大で第2世代(400×500mm級)のガラス基板に対応
高剛性設計と高性能制御により、低振動高精度位置決めを実現
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検索条件に一致する情報はありませんでした。
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こんなお問い合わせ
お待ちしております。
- 目的に応じた製品サービスの相談をしたい。
- 製品のデモ・サンプルの紹介を受けたい。